Multi-Patterning Techniques: Enabling Dimensions Beyond Lithography Resolution Limits
2:54
YouTubeLam Research
Multi-Patterning Techniques: Enabling Dimensions Beyond Lithography Resolution Limits
Lam Research demonstrates its advanced techniques for multiple patterning to create minute features on semiconductors. At sub-20 nanometer nodes, self-aligned patterning is used for line pitch scaling, which requires an increased number of deposition and etch steps to achieve dimensions beyond the lithography resolution limit. The self-aligned ...
59.6K viewsNov 18, 2016
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11K views · 217 reactions | Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation | Facebook
11K views · 217 reactions | Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation | Facebook
Facebook1 month ago
EPE variability comparison study of multiple patterning options for restricted 2D structures in advanced logic nodes
EPE variability comparison study of multiple patterning options for restricted 2D structures in advanced logic nodes
spiedigitallibrary.orgFeb 22, 2021
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Smarter. Smaller. More powerful. Advanced patterning packs more functionality into today’s tiniest chips. See how our solutions overcome patterning challenges and enable the next generation of semiconductor devices in this Semi 101 blog post. https://bit.ly/4oVFAYI | Lam Research Corporation
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