Extreme UV (EUV) lithography - SlideServe
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Extreme UV (EUV) lithography - SlideServe
Slide #17 (Why need…) and #24 (Bragg reflectors) are inserted later on. Extreme UV (EUV) lithography. Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity, LER, out-gassing). Contamination control.
394 viewsJul 29, 2014
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• SDO Images Plasma in 171 Å • • On the 1st of December 2025, a solar active region that just rotated into view of SDO offered a beautiful profile view of cascading loops spiralling above it following a small solar flare eruption. These structures are made of superheated plasma, just one of which is the size of several Earths. With its ability to capture the Sun in amazing detail, SDO observed it all in extreme ultraviolet light in 171 Å. (Angstroms). • Credit: NASA/SDO/AIA • | Astronomy Nation
• SDO Images Plasma in 171 Å • • On the 1st of December 2025, a solar active region that just rotated into view of SDO offered a beautiful profile view of cascading loops spiralling above it following a small solar flare eruption. These structures are made of superheated plasma, just one of which is the size of several Earths. With its ability to capture the Sun in amazing detail, SDO observed it all in extreme ultraviolet light in 171 Å. (Angstroms). • Credit: NASA/SDO/AIA • | Astronomy Nation
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