The construction of a PERIODIC signal on the basis of Fourier coefficients which give the AMPLITUDE and PHASE angle of each component sine wave HARMONIC. These coefficients are obtained through ...
The term scatterometry is a general term for a variety of methods that are used to analyze the diffraction spectrum from illuminated samples. The unknown structure parameters are reconstructed by the ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results